FEI Quanta 600 FEG Environmental Scanning Electron Microscope (ESEM)
High Vacuum Mode (normal SEM imaging)
Specifications Sheet This versatile scanning electron microscope is our most utilized due to its ease and flexibilty, with a number of options to look at many different types of samples. Equipped with a Schottky Field Emitter (thermal FEG), FEI Quanta 600F can operate with accelerating voltages from 200 eV to 30 keV with probe currents of 4.5 microamps. With a large chamber (38 cm or 15"), the stage moves X & Y = 150 mm; Z = 65 mm, rotate 360o, and tilts up to 70o.
Pressures of < 6 x 10-4 Pascal
Everhart-Thornley Secondary Electron (SE) Detector with adjustable voltage
Solid-state Diode Backscatter Electron (BSE) detector including Z-contrast and topography modes
Low Vacuum Mode (imaging of non-conductive samples that can't be coated with metal)
(see above examples in image slideshow from Michele Warmund, Alicia DeMaria, Diane Janick-Buckner and Phat Do)
Pressures from 10 to 133 Pascal using water vapor
Low vacuum Secondary Electron (LFD) Detector
Solid-state Diode Backscatter Electron (BSE) detector including Z-contrast and topography modes.
see a nice reference for Low Vac Modes and ESEM
Pressures from 133 to 2600 Pascal using water vapor
Gaseous secondary electron detector (GSED)
Gaseous back-scattered electron detector (GBSD)
Peltier Cooling Stage (see above examples in image slideshow from Michele Warmund, Alicia DeMaria, Diane Janick-Buckner and Phat Do)
Useful for imaging hydrated specimens
Prevents possible artifacts from critical point drying
Performed at cooler temperatures (2 oC) to prevent damage from electron beam
Temperature ranges from - 5 to 25 oC
Optional controlled temperature ramping from - 5 to 25 oC
Electron Beam Lithography (EBL - see above examples from Josef Brown)
Build nanoscale devices with precision
NPGS - Nanometer Patterning Generating System
Consistent line widths of 50 nm
Metal sputtering of platinum, gold, titanium, tantalum, nickel, chromium
We provide pre-coated silicon wafer substrates, pattern design (DesignCAD 22), writing, developing and lift-off.
Scanning Transmission Electron Microscopy
Holds 8 TEM samples (2 BF/DF, 6 BF)
X-ray Energy Dispersive Spectroscopy (EDS - see above examples from Jim Schiffbauer and Matt Maschmann)
Bruker Quantax 200 Silicon Drift Detector with Xflash6
Elemental composition analysis with greater sensitivity (0.2 weight percent for heavier elements), ability to detect lighter elements (5 weight percent for boron) and increased count rates (for trace element detection)
Ability to create spectra, point analysis, hyperspectral maps, montages, and perform particle counting/analysis with "Feature"
Offline processing of data with use of the offsite liscence...please install Bruker Esprit and download these instructions to set up (note, must be inside University of Missouri firewall).