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FEI Quanta 600 FEG Environmental Scanning Electron Microscope (ESEM)



Specifications Sheet This versatile scanning electron microscope is our most utilized due to its ease and flexibilty, with a number of options to look at many different types of samples. Equipped with a Schottky Field Emitter (thermal FEG), FEI Quanta 600F can operate with accelerating voltages from 200 eV to 30 keV with probe currents of 4.5 microamps. With a large chamber (38 cm or 15"), the stage moves X & Y = 150 mm; Z = 65 mm, rotate 360o, and tilts up to 70o.

High Vacuum Mode (normal SEM imaging)
  • Pressures of < 6 x 10-4 Pascal
  • Everhart-Thornley Secondary Electron (SE) Detector with adjustable voltage
  • Solid-state Diode Backscatter Electron (BSE) detector including Z-contrast and topography modes

    Low Vacuum Mode (imaging of non-conductive samples that can't be coated with metal) (see above examples in image slideshow from Michele Warmund, Alicia DeMaria, Diane Janick-Buckner and Phat Do)
  • Pressures from 10 to 133 Pascal using water vapor
  • Low vacuum Secondary Electron (LFD) Detector
  • Solid-state Diode Backscatter Electron (BSE) detector including Z-contrast and topography modes.
  • see a nice reference for Low Vac Modes and ESEM

    Environmental Mode
  • Pressures from 133 to 2600 Pascal using water vapor
  • Gaseous secondary electron detector (GSED)
  • Gaseous back-scattered electron detector (GBSD)

  • Peltier Cooling Stage (see above examples in image slideshow from Michele Warmund, Alicia DeMaria, Diane Janick-Buckner and Phat Do)
  • Useful for imaging hydrated specimens
  • Prevents possible artifacts from critical point drying
  • Performed at cooler temperatures (2 oC) to prevent damage from electron beam
  • Temperature ranges from - 5 to 25 oC
  • Optional controlled temperature ramping from - 5 to 25 oC

    Electron Beam Lithography (EBL - see above examples from Josef Brown)
  • Build nanoscale devices with precision
  • NPGS - Nanometer Patterning Generating System
  • Consistent line widths of 50 nm
  • Metal sputtering of platinum, gold, titanium, tantalum, nickel, chromium
  • We provide pre-coated silicon wafer substrates, pattern design (DesignCAD 22), writing, developing and lift-off.

    Scanning Transmission Electron Microscopy
  • STEM Detector
  • Holds 8 TEM samples (2 BF/DF, 6 BF)

    X-ray Energy Dispersive Spectroscopy (EDS - see above examples from Jim Schiffbauer and Matt Maschmann)
  • Bruker Quantax 200 Silicon Drift Detector with Xflash6
  • Elemental composition analysis with greater sensitivity (0.2 weight percent for heavier elements), ability to detect lighter elements (5 weight percent for boron) and increased count rates (for trace element detection)
  • Ability to create spectra, point analysis, hyperspectral maps, montages, and perform particle counting/analysis with "Feature"
  • Offline processing of data with use of the offsite liscence...please install Bruker Esprit and download these instructions to set up (note, must be inside University of Missouri firewall).

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